Micro-lens Array Fabrication by Two Photon Polymerization Technology

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Published Jul 16, 2025
DOI: https://doi.org/10.5875/ausmt.v3i2.186

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Tien-Tung Chung
Department of Mechanical Engineering, National Taiwan University, Taiwan
Yi-Ting Tu
Department of Mechanical Engineering, National Taiwan University, Taiwan
Ya-Hsun Hsueh
Department of Mechanical Engineering, National Taiwan University, Taiwan
Sheng-Yuan Chen
Department of Mechanical Engineering, National Taiwan University, Taiwan

Abstract

This paper presents the design and fabrication of micro-lens arrays (MLAs) by Two Photon Polymerization (TPP) technology. First, a computer program is developed to construct a solid MLA model with a specified focal length and lens diameter. A TPP laser scanning path for MLA fabrication is then generated. MLAs are fabricated by TPP, with quality assessed by SEM. Finally, good quality 5  5 MLA squares with dimensions 108  108 are successfully 
manufactured.

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How to Cite
Micro-lens Array Fabrication by Two Photon Polymerization Technology. (2025). International Journal of Automation and Smart Technology, 3(2), 131-135. https://doi.org/10.5875/ausmt.v3i2.186
Issue
Vol 3 No 2 (2013)
Section
Articles
Creative Commons License
This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

How to Cite

Micro-lens Array Fabrication by Two Photon Polymerization Technology. (2025). International Journal of Automation and Smart Technology, 3(2), 131-135. https://doi.org/10.5875/ausmt.v3i2.186